Versatile system for self-aligning deposition equipment

ABSTRACT

The present invention provides a system ( 100 ) for aligning a dispensing apparatus ( 110 ) utilized within a semiconductor deposition chamber ( 102 ). A stationary reference apparatus ( 106 ) is disposed along the bottom of the deposition chamber. A self-alignment support system ( 122 ), comprising one or more support components ( 124 ), is intercoupled between the dispensing apparatus and a deposition system exterior component ( 112 ). The self-alignment support system is adapted to facilitate and secure repositioning of the dispensing apparatus responsive to pressure applied to the dispensing surface ( 114 ) thereof. A non-yielding offset component ( 126 ) is placed upon a first surface ( 108 ) of the stationary reference apparatus. The dispensing surface of the dispensing apparatus is engaged with the offset component, and pressure is applied to the dispensing apparatus via the offset component until a desired alignment is achieved.

TECHNICAL FIELD OF THE INVENTION

The present invention relates generally to the field of manufacturingsemiconductor devices and, more particularly, to apparatus and methodsfor providing self-aligning deposition equipment.

BACKGROUND OF THE INVENTION

The continual demand for enhanced integrated circuit performance hasresulted in, among other things, a dramatic reduction of semiconductordevice geometries, and continual efforts to optimize the performance ofevery substructure within any semiconductor device. A number ofimprovements and innovations in fabrication processes, materialcomposition, and layout of the active circuit levels of a semiconductordevice have resulted in very high-density circuit designs. Increasinglydense circuit design has not only improved a number of performancecharacteristics, it has also increased the importance of, and attentionto, semiconductor material properties and behaviors.

The increased packing density of the integrated circuit generatesnumerous challenges to the semiconductor manufacturing process. Nearlyevery device must be smaller without degrading operational performanceof the integrated circuitry. High packing density, low heat generation,and low power consumption, with good reliability must be maintainedwithout any functional degradation. Increased packing density ofintegrated circuits is usually accompanied by smaller feature size.

As device geometries and features continually decrease in size, and asnew materials are introduced into semiconductor fabrication processes,many traditional semiconductor fabrication techniques and processes arerendered impractical or unusable. In order to adapt to the uniquedemands of new technologies (e.g., deep sub-micron), existingfabrication processes must renovated, or abandoned in favor of newfabrication processes. Consider, for example, conventional semiconductordeposition processes. Some conventional deposition techniques are simplynot capable of depositing semiconductor material at sub-micron levels ortolerances. Alternative deposition processes—such as thin-filmdeposition—have been developed in response, to more adequatelyaccommodate the demands of fabricating sub-micron device structures.

Thin-film deposition techniques, and other similar processes, often relyon relatively large, flat dispensing apparatus—commonly referred to as“showerheads”—to deposit a very fine layer of a semiconductor materialacross a significant portion of a semiconductor wafer surface. Ideally,if the showerheads are properly aligned, the semiconductor material isdeposited in a uniform manner across the surface. This is importantbecause non-uniformities in thin-film materials can cause a number ofvariances in device performance or reliability, degrading processyields. In many cases, however, showerheads frequently fall out ofalignment during processing. Deposition on semiconductor wafers musttherefore routinely be halted, while adjustments are made to properlyalign the showerheads.

This routine process interruption introduces a significant degree ofdelay and inefficiency into fabrication processes utilizing suchapparatus. Such inefficiencies and delays are further compounded andincreased by a number of impediments inherent in conventional showerheadalignment methodologies. Most such systems require numerous iterations(e.g., 6, 8, 12) of laborious and tedious manual measurements andcalibrations—each of which may take several hours, individually.

These manual adjustment procedures thus frequently take many (e.g., ˜12or more) hours and, in some cases, days to complete—as the depositionsystem is repetitively operated, measured and adjusted until properalignment is achieved. This causes a number of bottlenecks in thefabrication process, and places an inordinate drain on other processresources. Furthermore, conventional alignment methodologies commonlyrely, in large part, on the subjective measurements and adjustments ofoperators performing the alignment procedures. This introduces, to atleast a minimal extent, some degree of human error and unavoidableincongruity to the thin film deposition process. Non-uniformities thatresult over time can have further detrimental impacts on process yieldsand stability.

As a result, there is a need for a system for aligning depositionequipment and apparatus, such as thin-film deposition showerheads, thatprovides accurate and consistent equipment alignment while reducing oreliminating the need for iterative alignment processes, improvingprocess efficiency, yield and reliability in an easy, efficient andcost-effective manner.

SUMMARY OF THE INVENTION

The present invention provides a versatile system, comprising a numberof apparatus and methods, for providing self-aligning depositionequipment and apparatus—such as thin-film deposition showerheads. Thesystem of the present invention provides accurate and consistentequipment alignment, while obviating the need for iterative alignmentprocesses. Subjective inconsistencies and errors inherent inconventional methodologies are removed by the present invention—replacedby standardized system, apparatus and procedures. By the presentinvention, the process of aligning deposition equipment is optimized forefficiency and accuracy, improving process efficiency, yield andreliability in an easy and cost-effective manner.

The system of the present invention accurately and reproducibly alignsor levels a first, adjustable apparatus with respect to a second,stationary apparatus. A standardized spacing or offset component isplaced or secured along an operational surface of the stationaryapparatus during alignment procedures. The spacing component is formedor assembled of a dimension or configuration corresponding to thedesired or required operational offset between the adjustable apparatusand the stationary apparatus—thereby defining a proper alignmentposition for the adjustable apparatus.

The adjustable apparatus is brought into proximity with stationaryapparatus. A self-alignment support system supports the adjustableapparatus. This self-alignment support system comprises a number ofsecurely repositionable support components, which shift or otherwiseyield responsive to pressure exerted against an operational surface ofthe adjustable apparatus. As the adjustable apparatus is moved towardits operational position vis-à-vis the stationary component, theoperational surface of the adjustable apparatus contacts or otherwiseengages the offset component. Pressure exerted against the operationalsurface, as the adjustable apparatus is moved into its desired orrequired operational position against the offset component, forces oneor more of the support components within the self-alignment supportsystem to slide, move or otherwise shift to accommodate the forcedrepositioning of the adjustable apparatus by the offset component. Oncealigned, the offset component may be removed from the stationaryapparatus, as normal operation is resumed.

More specifically, embodiments of the present invention provide variousapparatus and methods for aligning a dispensing apparatus utilizedwithin a semiconductor deposition chamber. A stationary referenceapparatus is disposed along the bottom of the deposition chamber. Aself-alignment support system, comprising one or more supportcomponents, is intercoupled between the dispensing apparatus and adeposition system exterior component. The self-alignment support systemis adapted to facilitate and secure repositioning of the dispensingapparatus responsive to pressure applied to the dispensing surfacethereof. A non-yielding offset component is placed upon a first surfaceof the stationary reference apparatus. The dispensing surface of thedispensing apparatus is engaged with the offset component, and pressureis applied to the dispensing apparatus via the offset component until adesired alignment is achieved.

Other features and advantages of the present invention will be apparentto those of ordinary skill in the art upon reference to the followingdetailed description taken in conjunction with the accompanyingdrawings.

BRIEF DESCRIPTION OF THE DRAWINGS

For a better understanding of the invention, and to show by way ofexample how the same may be carried into effect, reference is now madeto the detailed description of the invention along with the accompanyingfigures in which corresponding numerals in the different figures referto corresponding parts and in which:

FIG. 1 provides an illustration depicting certain aspects of aself-alignment system in accordance with the present invention;

FIG. 2 provides an illustration depicting one embodiment of a supportstructure in accordance with the present invention; and

FIG. 3 provides an illustration depicting another embodiment of asupport structure in accordance with the present invention.

DETAILED DESCRIPTION OF THE INVENTION

While the making and using of various embodiments of the presentinvention are discussed in detail below, it should be appreciated thatthe present invention provides many applicable inventive concepts, whichcan be embodied in a wide variety of specific contexts. Certain aspectsof the present invention, for example, are hereafter illustrativelydescribed in specific conjunction with embodiments of self-aligningshowerhead apparatus within thin-film deposition systems. The specificembodiments discussed herein are, however, merely demonstrative ofspecific ways to make and use the invention and do not limit the scopeof the invention.

The present invention provides a versatile system that accurately andreproducibly aligns, adjusts, or levels (hereafter “aligns”) anadjustable apparatus with respect to a second, stationary apparatus. Thepresent invention provides a standardized spacing or offset componentthat is placed or secured along an operational surface of the stationaryapparatus during alignment procedures. The spacing component is formedor assembled of a dimension or configuration corresponding to thedesired or required operational offset between the adjustable apparatusand the stationary apparatus—thereby defining a proper alignmentposition for the adjustable apparatus.

The adjustable apparatus is brought into proximity with stationaryapparatus. The adjustable apparatus is supported upon a self-alignmentsupport system. The self-alignment support system comprises a number ofsupport components that are securely repositionable responsive topressure exerted against an operational surface of the adjustableapparatus. As the adjustable apparatus is moved toward its operationalposition vis-à-vis the stationary component, the operational surface ofthe adjustable apparatus contacts or otherwise engages the offsetcomponent. Pressure is exerted, directly or indirectly, by the offsetcomponent against the operational surface, as the adjustable apparatusis moved into its desired or required operational position against theoffset component. This causes one or more of the support componentswithin the self-alignment support system to slide, move or otherwiseshift to accommodate the forced repositioning of the adjustableapparatus by the pressure applied thereto via the offset component. Oncealigned, the self-alignment support system retains or secures the newalignment or repositioning of the adjustable apparatus. The offsetcomponent may be removed from the stationary apparatus, and normaloperation with the repositioned adjustable apparatus may be commenced.

Certain aspects of the present invention are described in greater detailnow with reference to FIG. 1, which depicts one embodiment of adeposition system 100 according to the present invention. System 100comprises a thin-film deposition chamber 102, bounded by a chamberhousing 104. Within the lower portion of chamber 102, a heater block 106is disposed. During the operation of system 100, block 106 remainsstationary and, along its upper surface 108, heats a semiconductor waferdisposed thereupon. This heating facilitates the deposition ofsemiconductor materials onto the semiconductor wafer by dispensingapparatus 110 (e.g., showerhead). Apparatus 110 is adjustably secured tochamber top 112, which is movable up and down with respect to chamber102.

In its down position, top 112 locks to or otherwise engages with housing104 to provide a sealed, controlled environment within chamber 102during deposition. In many cases, for example, chamber 102 may be heatedto high temperature (e.g., ˜325° C.-450° C.) and reduced tosub-atmospheric pressure, in order to facilitate proper thin-filmdeposition. In down position, top 112 holds an operational surface 114of showerhead 110 in operational proximity to surface 108. In its upposition, top 112 disengages and lifts away from housing 104, andremoves apparatus 110 from chamber 102 by an amount sufficient to allowoperational access to chamber 102, for matters such as cleaning orloading/unloading of semiconductor wafers.

Cover 112 has an aperture or channel 116 formed therethrough, in agenerally central location thereof. A column 118 is disposed, in adisplaceable arrangement, through aperture 116, and couples to an upperportion or surface of apparatus 110. In certain embodiments, column 118may comprise a conduit or other appropriate supply line for deliveringdeposition materials to apparatus 110. In other embodiments, column 118may comprise a support member (e.g., a post) providing support forapparatus 110 in accordance with the present invention. In still otherembodiments, column 118 may provide both support and supplyfunctionalities. Column 118 is secured within aperture 116 by one ormore gasket members 120 (e.g., O-rings). Members 120 are sturdy andstrong enough to provide a seal around column 118 sufficient to ensureproper operational environmental conditions within chamber 102 (e.g.,pressurization). Members 120 are also deformable or resilient in nature,such that as apparatus 110 is moved, relative to top 112, then column118 may also shift accordingly within aperture 116.

System 100 further comprises a self-alignment support system 122,coupled between an upper portion or surface of apparatus 110, and alower surface of top 112. As depicted in FIG. 1, system 122 comprises aplurality of support components 124, disposed in equal intervals aboutthe upper perimeter of apparatus 110. The support components 124 areformed or fabricated, in accordance with the present invention, tofacilitate the repositioning of apparatus 110, and to retain or securethat repositioning. The number of individual components 124 withinsystem 122 may be varied widely, depending upon the size, composition oroperation of apparatus 110. For example, only a single component 124 maybe desired or required to provide a single axis of alignment for arelatively small showerhead. In many embodiments, however, three supportcomponents 124 provide a sufficient range of adjustment over multipleaxes for showerhead 110.

When alignment of apparatus 110 is to be performed, top 112 is separatedfrom housing 104, and a standardized spacing or offset component 126 isplaced upon surface 108. Component 126 comprises one or more articles ofrigid, non-yielding material (e.g., ceramic ring, ceramic or aluminumblocks) sufficient to withstand the operating conditions within chamber102 and pressures exerted in aligning apparatus 110. Component 126 isformed of a height and contour, and is placed along surface 108 in sucha manner, that defines the desired or required opening between surfaces108 and 114 for normal operation. Component 106 thus serves as a base orframe of reference from which alignment is determined or measured.

Top 112 is then lowered into place, enclosing chamber 102. As top 112 islowered into place, surface 114 may begin to come into contact with theupper portion(s) of component 126. The closing pressure of top 112 maycause any portion(s) of surface 114 that might be lower than others(i.e., out of alignment) to press against component 126. Component 126is, however, formed of a non-yielding material, and is disposed upon andsupported by stationary block 106. Apparatus 110 is supported bycomponents 124 which, as described in greater detail hereafter, do yieldto pressure(s) exerted upon surface 114. Thus, any pressure that may beexerted between surface 114 and component 126, during the closing of top112, begins the self-alignment process of the present invention.

Once top 112 and housing 104 have securely closed or otherwise engaged,normal operating conditions are initiated within chamber 102, andsurface 114 is brought into full contact and engagement with component126. Any pressure exerted between surface 114 and component 126, inducedby the operating conditions within chamber 102, is translated intorepositioning pressure against surface 114 via component 126—providingself-alignment of apparatus 110 in accordance with the presentinvention. For example, any adjustments to environmental pressure (e.g.,pressurization or depressurization) within chamber 102 may causeportion(s) of surface 114 to press against component 126, facilitatingalignment as previously described. Similar effects caused by thermalexpansion and contraction may also exert self-aligning pressure uponapparatus 110. As such pressure(s) are exerted upon apparatus 110, viasurface 114, support components 124 adjust in accordance with thepresent invention to balance the pressure(s) on apparatus 110, andretain its adjusted position vis-à-vis component 126.

Once system 100 has been maintained at operating conditions for a timesufficient to complete showerhead alignment, conditions within chamber102 are normalized and top 112 is opened. Component 126 is removed fromchamber 102, and the closed, operational spatial relationship betweensurface 108 and surface 114, as previously defined by component 126, isnow held in place by support component(s) 124. Normal depositionoperations may then resume, after only one alignment iteration has beenperformed according to the present invention. Allowances or variationsthat may be desired or require due to, for example, differences inthermal expansion between different materials, can be accounted for byaltering the size or configuration of offset component 126.

Referring now to FIG. 2, one general embodiment of a self-alignmentsupport system 200 is depicted. System 200 intercouples a supportcomponent 202 between a showerhead 204 and a deposition system exteriorcomponent 206 (e.g., removable top, housing sidewall). Component 202comprises an attachment member 208 that is immovably secured tocomponent 206. Component 202 further comprises a support member 210 thatis coupled to, and extends orthogonally from, an upper surface 212 ofshowerhead 204 near its outer perimeter. A grasping component 214 iscoupled to member 208. Component 214 houses a positioning component 216that engages with a portion of member 210, in a pressure adjustablerelationship. Component 216 may comprise a friction fitting (e.g.,resilient gasket, resilient sleeve) or ratcheting mechanism that allowsmember 210 to travel upwardly or downwardly through component 214 assufficient alignment pressure is applied to showerhead 204. Once suchmovement under pressure ceases, component 216 retains and secures theposition of member 210, and thereby the aligned position of showerhead204.

The size, dimension, orientation and composition of member 208 and 210,and components 214 and 216, may be varied greatly depending upon therequirements of the tool or system within which system 200 isimplemented. For example, the relative size and length of members 208and 210 are provided such that member 210 may move, within component214, through a full range of potential adjustment positions forshowerhead 204 without contacting component 206. In another example,member 210 may comprise a ceramic rod that provides greater frictionwith, for example, a rubberized component 216 than a metallic memberwould. Furthermore, each member, component or subsystem of system 200may have further features, devices or substructures that furtherfacilitate self-alignment in accordance with the present invention.

Such features are illustrated now with reference to FIG. 3, whichdepicts one embodiment of a self-alignment support system 300 accordingto the present invention. System 300 comprises a support component 302intercoupled between a showerhead 304 and a deposition system exteriorcomponent 306 (e.g., removable top, housing sidewall). Component 302comprises an attachment member 308 that is immovably secured tocomponent 306. Member 308 may comprise any suitable attachmentstructure, such as a ceramic or aluminum bolt or screw. As depicted inFIG. 3, member 308 comprises a bolt secured to component 306.

Component 302 further comprises a support member 310 that is coupled to,and extends orthogonally from, an upper surface 312 of showerhead 304near its outer perimeter. Support member 310 may comprise any suitablematerial (e.g., ceramic, aluminum) that conforms to the requirements ofthe present invention. Member 310 is of a size small enough to avoiddirect contact with component 306, but sufficient to allow a full rangeof adjustment of showerhead 304. Member 310 may be permanently oradjustably coupled to showerhead 304. In the embodiment depicted in FIG.3, for example, member 310 is coupled to showerhead 304 by a screw-typeconnection 314.

Component 302 further comprises a grasping component 316 that is coupledto member 308. Component 316 comprises a flange portion 318 that extendslaterally from a grasping portion 320. Portion 318 has an aperture 322formed therethrough. Component 302, via aperture 322, is affixed tomember 308 and secured in place by fasteners 324 (e.g., clevis pins, hexnuts). Aperture 322 may comprise a number of textures or contours thatfacilitate the secure coupling of component 302 to member 308. Forexample, in embodiments where member 308 is a bolt, aperture 322 mayinternal threading that enables component 302 to be screwed directlyonto member 308. In alternative embodiments, aperture 322 may compriseadditional internal subcomponents (e.g., gaskets, O-rings) to facilitatesecure coupling.

Grasping portion 320 comprises a sleeve-type structure, having a channelor aperture 326 formed therethrough that receives and holds a portion ofmember 310. Portion 320 houses, at one or more locations along aperture326, one or more positioning components 328. Component 328 engages withsome portion of member 310, in a pressure-fitted, pressure-adjustablerelationship. Component 328 may comprise, for example, a frictionfitting (e.g., resilient gasket, ring clamp) or ratcheting mechanismthat allows member 310 to travel upwardly or downwardly through aperture326 as sufficient alignment pressure is applied upwardly or downwardlyto showerhead 304. Once such movement under pressure ceases, component328 retains and secures the position of member 310, and thereby thealigned position of showerhead 304. In the embodiment depicted in FIG.3, component 328 comprises O-rings disposed at the upper and lowerportions of aperture 326. These O-rings are formed of a size andmaterial composition that provides a secure friction fit with member310.

In certain embodiments, additional features may be provided withincomponent 302 to further facilitate self-alignment functions. Forexample, member 310 may be provided with a deviated (i.e., non-smooth)texture, gradation or contour 330 (e.g., notches, ribbing) that works inconjunction with component 328. Contour 330, in conjunction withcomponent 328, may be provided to increase the integrity of theengagement between component 328 and member 310. Contour 330 may also beprovided to quantify or scale the amount by which member 210 is movedduring alignment—providing more accurate alignments.

In the embodiment depicted in FIG. 3, for example, the O-rings 328engage with each notch 330 as member 310 is moved up or down. SmallerO-rings may thus be used to increase the amount of pressure required toalign showerhead 304, and to more securely hold member 310 in place oncealignment is completed. The relative size and number of notches 330 maybe altered to provide larger or smaller alignment “steps” along member310.

In certain embodiments, a locking component 332 may be provided tofurther secure member 310 in alignment position. As depicted in FIG. 3,component 332 comprises a screw disposed through portion 320, extendableinto friction engagement with member 310 within aperture 326. In thisembodiment, screw 332 comprises a pointed tip, adapted to engage withfeatures along contour 330. Alternatively, screw 332 may comprise a flattip that simply abuts member 310 in a frictional manner. Other similaradjustable locking mechanisms (e.g., clamps, pins) may also be providedfor component 332.

Thus, according to the present invention, a versatile self-alignmentsupport system is provided in conjunction with other apparatus andmethods to render alignment of deposition equipment efficient andaccurate. As noted hereinabove, a number of variations and alternativeembodiments are comprehended by the present invention. The components,members, and systems of the present invention may be fabrication orformed from a number of suitable materials, depending upon the functionof each. Materials (e.g., aluminum, ceramics, high-density plastics orpolymers) that can withstand the heat (e.g., ˜325° C.-450° C.), thegeneral pressure of the deposition chamber, and pressures exerted on aparticular component may be utilized. Certain components, such asO-rings or gaskets, may be formed of any material that can provide thenecessary friction or seal, under the environmental stresses, withoutbreaking apart or generating particles that could contaminate thedeposition process. Other orientations of components and members arefurther comprehended. For example, the support systems and alignmentprocesses may be adapted to provide for a horizontal alignmentconfiguration, rather than vertical. The support components of thepresent invention may be disposed along a chamber sidewall, instead ofits top. In other embodiments, the support components may providedeflective or deformable members that yield in response to pressure(s)exerted. These and other variations are comprehended hereby.

The embodiments and examples set forth herein are therefore presented tobest explain the present invention and its practical application, and tothereby enable those skilled in the art to make and utilize theinvention. However, those skilled in the art will recognize that theforegoing description and examples have been presented for the purposeof illustration and example only. The description as set forth is notintended to be exhaustive or to limit the invention to the precise formdisclosed. As stated throughout, many modifications and variations arepossible in light of the above teaching without departing from thespirit and scope of the following claims.

1. A method of aligning a dispensing apparatus within a semiconductordeposition system, the method comprising the steps of: providing adispensing apparatus; providing a stationary reference apparatus;providing a self-alignment support system, coupled to a first surface ofand supporting the dispensing apparatus, adapted to facilitate andsecure repositioning of the dispensing apparatus responsive to pressureapplied thereto; placing a non-yielding offset component upon a firstsurface of the stationary reference apparatus; engaging a second surfaceof the dispensing apparatus with the offset component; and applyingpressure to the dispensing apparatus via the offset component.
 2. Themethod of claim 1, wherein the step of placing a non-yielding offsetcomponent further comprises placing a single component.
 3. The method ofclaim 1, wherein the step of placing a non-yielding offset componentfurther comprises placing a plurality of components.
 4. The method ofclaim 1, wherein the step of placing a non-yielding offset componentfurther comprises placing a ceramic component.
 5. The method of claim 1,wherein the step of providing a self-alignment support system furthercomprises providing a plurality of support components intercoupledbetween the dispensing apparatus and a deposition system exteriorcomponent.
 6. The method of claim 5, wherein the step of providing aself-alignment support system further comprises providing three supportcomponents intercoupled between the dispensing apparatus and adeposition system exterior component.
 7. The method of claim 1, whereinthe step of providing a self-alignment support system further comprisesthe steps of: providing an attachment member secured to a depositionsystem exterior component; providing a support member coupled to thefirst surface of the dispensing apparatus; providing a graspingcomponent coupled to the attachment member; and providing a positioningcomponent, housed within the grasping component, and engaged with aportion of the support member in a pressure adjustable relationship. 8.The method of claim 7, wherein the step of providing a positioningcomponent further comprises providing a friction fitting.
 9. The methodof claim 7, wherein the step of providing a positioning componentfurther comprises providing an O-ring.
 10. The method of claim 1,wherein the step of applying pressure to the dispensing apparatus viathe offset component comprises applying closing pressure to thesemiconductor deposition system.
 11. The method of claim 1, wherein thestep of applying pressure to the dispensing apparatus via the offsetcomponent comprises adjusting environmental pressure within thesemiconductor deposition system.
 12. A semiconductor depositionalignment system comprising: a deposition chamber; a heater blockdisposed along a bottom portion of the deposition chamber; a dispensingapparatus disposed within the deposition chamber, above the heaterblock; a self-alignment support system intercoupled between thedispensing apparatus and an exterior component of the depositionchamber; and an offset component interposed between the heater block andthe dispensing apparatus.
 13. The system of claim 12, wherein thedeposition chamber further comprises a thin-film deposition chamber. 14.The system of claim 12, wherein the dispensing apparatus furthercomprises a deposition showerhead.
 15. The system of claim 12, whereinthe offset component comprises a plurality of components.
 16. The systemof claim 12, wherein the offset component comprises ceramic.
 17. Thesystem of claim 12, wherein the self-alignment support system furthercomprises: an attachment member secured to the exterior component of thedeposition chamber; a support member coupled to and extendingorthogonally from dispensing apparatus; a grasping component, having agrasping portion, and a flange portion that couples to the attachmentmember; an aperture formed within the grasping portion, through which aportion of the support member is disposed; and a positioning component,housed within the grasping portion along the aperture, adapted to engagewith the support member in a pressure adjustable relationship.
 18. Thesystem of claim 17, wherein the self-alignment support system furthercomprises a locking component.
 19. The system of claim 17, wherein thesupport member comprises a deviated contour.
 20. The system of claim 18,wherein the locking component further comprises a screw housed withinthe grasping component and adapted to frictionally engage with thesupport member.